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● Metal Ion Beam Facility
● Gaseous Ion Beam Facility
▶ Operation Manager
e-mail : komac@kaeri.re.kr Tel : 82-54-750-5004
▶ Metal Target Room scene
▶ Specification of Metal
Energy | 20 ~ 150 keV |
Beam Current | ~ 1 mA |
Ion Species | Cr, Fe, Co, Cu, etc |
Irradiaton Area | 10 cm x 10 cm (uniformity > 90%) |
Application Field | dopants for semiconductor, color formation of gem, surface treatment for the artificial joints and artificial teeth |
▶ Operation Manager
e-mail : komac@kaeri.re.kr Tel : 82-54-750-5004
▶ Gas Target Room scene
▶ Specification of Gas
Energy |
20 ~ 200 keV |
Beam Current |
~ 5 mA |
Ion Species |
H, He, N, O, Ar, Kr, Xe, etc |
Irradiaton Area |
10 cm x 10 cm (uniformity > 90%) |
Application Field |
Enhancement of mechanical, optical, and electric properties and surface modification of materials |
