Low Energy Ion Beam Facilities

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 ● Metal Ion Beam Facility

 

 ● Gaseous Ion Beam Facility

 

 ● Vertical-type Ion Beam Facility


 

 

 

Operation Manager

      Name : Sunmog Yeo          e-mail : sunmog@kaeri.re.kr          Tel : 82-54-750-5309

 


 

 Energy

 20 ~ 150 keV 

 Beam Current

 ~ 1 mA

 Ion Species

 Cr, Fe, Co, Cu, etc    

 Irradiaton Area

 10 cm x 10 cm

 (uniformity > 90%)

 Application Field

 dopants for semiconductor, color formation of gem,

 surface treatment for the artificial joints and artificial teeth

 

 

Operation Manager

      Name : Bum-Seok Kim          e-mail : kbs0721@kaeri.re.kr          Tel : 82-54-750-5302

 


 

 Energy

 20 ~ 200 keV 

 Beam Current

 ~ 5 mA

 Ion Species

 H, He, N, O, Ar, Kr, Xe, etc    

 Irradiaton Area

 10 cm x 10 cm

 (uniformity > 90%)

 Application Field

 Enhancement of mechanical, optical, 

 and electric properties and surface modification of materials

 

 

Operation Manager

      Name : Bum-Seok Kim          e-mail : kbs0721@kaeri.re.kr          Tel : 82-54-750-5302

 


 

 Energy

 ~ 60 keV 

 Beam Current

 ~ 20 mA

 Ion Species

 H, He, N, O, Ar, Kr, Xe, etc    

 Irradiaton Area

 30 cm x 30 cm

 (uniformity > 90%)

 Application Field

 Surface treatment for large area and high dose